A High-quality Factor Mode-localized MEMS Electric Field Sensor

WANG Guijie; CHU Zhaozhi; YANG Pengfei; RAN Lifang; PENG Chunrong; LI Jianhua; ZHANG Bo; WEN Xiaolong

doi:10.11999/JEIT241008

Volume 47 Issue 6

Jun. 2025

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WANG Guijie, CHU Zhaozhi, YANG Pengfei, RAN Lifang, PENG Chunrong, LI Jianhua, ZHANG Bo, WEN Xiaolong. A High-quality Factor Mode-localized MEMS Electric Field Sensor[J]. Journal of Electronics & Information Technology, 2025, 47(6): 2015-2022. doi: 10.11999/JEIT241008

Citation:

WANG Guijie, CHU Zhaozhi, YANG Pengfei, RAN Lifang, PENG Chunrong, LI Jianhua, ZHANG Bo, WEN Xiaolong. A High-quality Factor Mode-localized MEMS Electric Field Sensor[J]. Journal of Electronics & Information Technology, 2025, 47(6): 2015-2022. doi: 10.11999/JEIT241008

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A High-quality Factor Mode-localized MEMS Electric Field Sensor

doi: 10.11999/JEIT241008 cstr: 32379.14.JEIT241008

WANG Guijie^{1, 2},
CHU Zhaozhi³,
YANG Pengfei⁴,
RAN Lifang^{1, 2},
PENG Chunrong⁵,
LI Jianhua^{1, 2},
ZHANG Bo^{1, 2},
WEN Xiaolong^{1, 2
,
,}

1.
School of Mathematics and Physics, University of Science and Technology Beijing, Beijing 100083, China
2.
Beijing Weak Magnetic Detection and Application Engineeering Technology Reserch Center, University of Science and Technology Beijing, Beijing 100083, China
3.
Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
4.
School of Applied Science, Beijing Information Science and Technology University, Beijing 100192, China
5.
Aerospace Information Research Institute, Chinese Academy of Science, Beijing 100094, China

Funds: The National Defense Basic Scientific Research program of China (JCKY2022110C013), The National Natural Science Foundation of China (62031025, 62101054), The National Key Research and Development Program of China (2022YFB3207300), The Curriculum Construction Project for International Students of USTB (2023KCYB003)

Received Date: 2024-11-12
Rev Recd Date: 2025-03-12

Available Online: 2025-03-19

Publish Date: 2025-06-30

Abstract

Abstract

Objective High-performance Micro-Electro-Mechanical Systems (MEMS) Electric Field Sensors (EFS) are essential for measuring atmospheric electric fields and non-contact voltage. The mode localization effect can significantly improve resolution and is a recent focus in EFS research. However, in weakly coupled resonant systems, mode aliasing occurs when the quality factor is low, hindering the extraction of valid amplitude information. This study proposes a novel resonant MEMS EFS based on mode localization. The sensor employs a Double-Ended Tuning Fork (DETF) structure and a T-shaped tether to minimize energy loss, achieving a high-quality factor and resolution while effectively mitigating mode aliasing. This study presents theoretical analysis and numerical simulations. A prototype is fabricated and tested at a pressure of $ {10}^{-3}\;\mathrm{P}\mathrm{a} $. Experimental results demonstrate that within an electric field range of $ 0～90\;\mathrm{k}\mathrm{V}/\mathrm{m} $, the EFS exhibits a resolution of $ 32(\mathrm{V}/\mathrm{m})/\sqrt {\mathrm{H}\mathrm{z}} $, and a quality factor of 42,423. Methods The sensor comprises two coupled resonators based on a tuning fork and T-shaped tether structure. It utilizes the principle of mode localization and an amplitude ratio output metric to enhance electric field sensing performance and prevent mode aliasing. The primary measurement principle is based on the transmission of induced charge from the electric field sensing electrode to the perturbed electrode of Resonator 1 through an electrical connection. This perturbed electrode generates a negative electrostatic perturbation, inducing mode localization in the coupled resonators. The resulting change in the amplitude ratio enables electric field detection. Furthermore, the tuning fork and T-shaped tether structure are designed to minimize clamping and anchor losses, thereby achieving a high-quality factor and effectively mitigating mode aliasing. Results and Discussions This study presents a mode-localized MEMS EFS that achieves a high-quality factor of 42,423 and a high resolution of $ 32\;(\mathrm{V}/\mathrm{m})/\sqrt {\mathrm{H}\mathrm{z}} $, effectively preventing mode aliasing. Experiments are conducted in a vacuum chamber at a pressure of $ {10}^{-3}\;\mathrm{P}\mathrm{a} $. The vacuum environment leads to heat accumulation from the amplifiers on the circuit board, increasing the board’s temperature and causing temperature drift in the sensor. Temperature drift is identified as the primary source of error in sensor testing. Future work will focus on testing the sensor chip with vacuum packaging to mitigate temperature drift caused by the vacuum chamber. Further optimization of the chip and circuit structures is conducted to minimize the effects of feedthrough and parasitic capacitance. Additionally, a differential structure will be designed to enhance common-mode rejection. Conclusions This study addresses mode aliasing in weakly coupled structures by proposing a mode-localized EFS based on a DETF and a T-shaped tether design. The DETF reduces clamping losses, while the T-shaped tether minimizes anchor losses. These structural optimizations reduce energy dissipation, enhance the quality factor, and effectively mitigate mode aliasing. The structural design, working principle, and sensitivity characteristics of the sensor are analyzed through numerical simulations, demonstrating that a lower quality factor under the same coupling strength can induce mode aliasing. The sensor fabrication process is introduced, and a prototype is developed. A testing system is established to evaluate the sensor’s performance in both open-loop and closed-loop configurations. Experimental results indicate that under a pressure of $ {10}^{-3}\;\mathrm{P}\mathrm{a} $ and within an electric field range of $ 0～90\;\mathrm{k}\mathrm{V}/\mathrm{m} $, the sensor achieves a quality factor of 42,423, a resolution of $ 32\;(\mathrm{V}/\mathrm{m})/\sqrt {\mathrm{H}\mathrm{z}} $, and a sensitivity of $ 0.0336\;/(\mathrm{k}\mathrm{V}/\mathrm{m}) $. The sensor demonstrates a high-quality factor and excellent electric field resolution while effectively mitigating mode aliasing in mode-localized sensors. This work provides valuable insights for EFS research and the structural design of mode-localized sensors.
- Mode localization,
- Micro-Electro-Mechanical Systems (MEMS),
- Electric Field Sensor (EFS),
- High-quality factor,
- T-shaped tether,
- Double-Ended Tuning Fork (DETF)

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References(22)

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